Novoto's specialty is in semiconductor/flat panel display (FPD) capital equipment. Novoto has extensive development experience with automated wafer and wafer pod handling. Novoto has several years of experience developing the state of the art imprint lithography equipment, capable of printing sub-30 nm features. In addition, Novoto has experience with FPD automated optical inspection (AOI) equipment that is capable of inspecting sub-350nm defects with a very fast TACT.

Our design/equipment experiences include:

> AOI equipment capable of inspecting sub-350nm defects.
> Nano-imprint lithography equipment capable of printing sub-30 nm features.
> EFEM (Equipment Front End Module).
> AMHS (Automated Material Handling System).
> Standalone wafer sorters.
> 300mm loadports.
> High precision RTZ robots.
> Various end effectors (both vacuum and edge grip, active/passive)
> Wafer pre-aligners (both vacuum and edge grip)
> Automated cassette tilt/rotate stage
> Various reticle pod openers
> FFU (Fan Filter Unit) and mini environments
> Automated wet chemical tools
> Fab-wide bulk chemical distribution system
> Process piping (ultra high purity gas/chemical)
> UHP gas panels with mass flow controllers
> Pneumatic/vacuum control systems

Novoto can design products that satisfy ISO class 3 or better cleanliness.

Novoto understands the safety and ergonomic requirements outlined by SEMI and CE standards. Clients can save money and time by having a solid design that satisfies the international standards.

Novoto understands ultra precision engineering. Our experience includes:

> Monolithic flexures for very precise small movements
> Various friction free flexure linkages and mechanisms
> Sub 50 nm flatness wafer chucks
> Sub 5 um flatness G4 size FPD chuck (730mm x 920mm)
> High magnification microscopes mounts (opto mechanics)
> Zero friction air bearings
> High resolution air gages for distance/flatness measurements
> Utilization of thermally stable materials such as Invar/Kovar/Zerodur
> Vibration isolation system
> Pico liter resolution fluid dispense system

Novoto is knowledgeable about what's commonly accepted in the semiconductor industry and what's not. Novoto can save client's money by specifying the right material/components the first time. We have employees with full-time fab experience. Therefore, we understand the customer's requirements very well. We understand how fabs operate and how equipment is maintained in the fab. Essentially, we have fab customers designing the tools.

All projects are supervised by a registered Professional Engineer. Each project schedule is maintained by a project management software.